Homoepitaxial Ga2O3 Structures for Power Device Applications

Abstract

Advance the state-of-the-art of ultra-wide bandgap steady-state and pulsed power electronics by developing benchmark device structurAdvance the state-of-the-art of ultra-wide bandgap steady-state and pulsed power electronics by developing benchmark device structures based on high quality homoepitaxial Ga2O3 on native -Ga2O3 substrates. Demonstrate that high quality, large-area Ga2O3 substratees based on high quality homoepitaxial Ga2O3 on native -Ga2O3 substrates. Demonstrate that high quality, large-area Ga2O3 substrates and low-defect density epilayers grown by Novel Crystal Technology are a viable platform for the development of commercial -Ga2O3s and low-defect density epilayers grown by Novel Crystal Technology are a viable platform for the development of commercial -Ga2O3--based high voltage, high power devices. Demonstrate a vertical Ga2O3 power SBD with breakdown voltage of 5-10 kV while maintainingbased high voltage, high power devices. Demonstrate a vertical Ga2O3 power SBD with breakdown voltage of 5-10 kV while maintaining o on resistance Ron below 1 mcm2. Building on this technology, demonstrate a vertical Ga2O3 power transistor with breakdown voltagen resistance Ron below 1 m to cm2. Building on this technology, demonstrate a vertical Ga2O3 power transistor with breakdown voltage limited only by the intrinsic breakdown of the dielectrics in the device. limited only by the intrinsic breakdown of the dielectrics in the device.

Document Details

Document Type
DoD Grant Award
Publication Date
Sep 11, 2020
Source ID
N629092012055

Entities

People

  • Akito Kuramata

Organizations

  • Novel Crystal Technology, Inc.
  • Office of Naval Research
  • United States Navy

Tags

Fields of Study

  • Materials science

Readers

  • Defense Acquisition Program Management
  • Distributed Systems and Data Platform Development
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics