Breaking the Loss Limitation of SiN Resonators
Abstract
The scope of this work is to develop comprehensive and methodical approach to reduce the losses in Silicon Nitride (SiN) in order to achieve an ultra-high quality (Q) factor (e.g. 100 million) of on-chip resonators.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- May 11, 2016
- Source ID
- N660011514052
Entities
People
- Michael Lipson
Organizations
- Columbia University
- Defense Advanced Research Projects Agency
- Naval Information Warfare Center Pacific