"Development of Mid-Infrared Plasmonic Nanobolometers Using Ultrathin Silicon-On-Thermal-Insulator (SOTI)"

Abstract

The scope of this effort is to experimentally demonstrate a bolometer array in the mid-infrared wavelength range with pixel size smaller than 8m and low noise equivalent temperature difference (NETD). The effort will further demonstrate a pathway toward development of room temperature integrated bolometer arrays with an individual pixel size of 6×6 m2 and a NETD below 50 mK. Design, fabrication and characterization of the devices shall be performed and results reported. This work will enable future demonstration of large focal plane arrays with high sensitivity in the mid-infrared.

Document Details

Document Type
DoD Grant Award
Publication Date
Aug 05, 2019
Source ID
N660011914038

Entities

People

  • Zhenqiang Ma

Organizations

  • Defense Advanced Research Projects Agency
  • Naval Information Warfare Center Pacific
  • University of Wisconsin–Madison

Tags

Fields of Study

  • Physics

Readers

  • Image Processing and Computer Vision.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Microelectronics