Modeling, Fabrication and Characterization of Self-Aligned 2D and 3D Nanowire Arrays for Terahertz Operation
Abstract
To develop self-aligned, large-scale 2D and 3D nanowire arrays based on CMOS compatible processes to demonstrate THz device concepts at frequencies at or above 1 THz. This project will develop fabrication techniques to create self-.aligned nanowire arrays by deep reactive etching (DRIE) and annealing of etched single crystal silicon wafers in a hydrogen-ambient, followed by the filling of the produced nanochannel with suitable materials. In particular, the following tasks will be carried out: 1. Create 2.D arrays of parallel nanowires. 2. Create arrays of vertically stacked grids. 3. Create 3D arrays of intersecting nanowires. 4. Test 3D structures with time-domain THz waveforms.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jan 12, 2017
- Source ID
- W911NF1510297
Entities
People
- Arturo Ayón
Organizations
- Army Contracting Command
- United States Army
- University of Texas at San Antonio