Instrumentation up-fit for reactive nanolaminate PVD
Abstract
PI Maria conducted an instrument upfit for physical vapor deposition (PVD) systems that combines electron beam (e-beam) evaporation with magnetron sputtering and pulsed laser deposition. The original instrumentation was supported by a 2014 DURIP award to enable clean, uniform, and rapid deposition of a wide variety of metallic, semiconducting, and ceramic thin films that serve multiple current and pending DoD programs at NCSU. While this instrumentation benefits several programs, its primary role is to support nanoenergetic materials research and the new NCSU-led MURI: Multi-modal Energy Flow at Atomically Engineered Interfaces.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jan 30, 2017
- Source ID
- W911NF1610077
Entities
People
- Jon-Paul Maria
Organizations
- Army Contracting Command
- North Carolina State University
- United States Army