Acquisition of a UHV sputtering system for the study of topological electronic phases
Abstract
Funding from the Defense University Research Instrumentation Program was used to acquire a high vacuum thin-film deposition system. Its capabilities include two sputtering guns for DC and RF sputtering deposition, as well as two thermal evaporation sources. This system is used in conjunction with electron-beam lithography to fabricate superconducting heterostructures based on van-der-Waals materials.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Apr 08, 2019
- Source ID
- W911NF1610228
Entities
People
- François Amet
Organizations
- Appalachian State University
- Army Contracting Command
- United States Army