Acquisition of an Advanced Mask Aligner and a Spin Coater Unit for Research at Micro and Nanoscale for Energy Harvesting and Nanoelectronics at Alabama A&M University
Abstract
The objective of this proposal is to acquire a state-of-the-art SUSS MABA6 Gen3 mask aligner system to enable researchers at the Alabama A&M University (AAMU), a leading HBCU, to fabricate the micro- and nanoscales devices. The capability of fabricating materials and devices at micro and nanoscale is critical not only for the advancement of science and technology, but also for the training of the future scientific workforce. Currently, 10 engineering and science faculty members and more than 30 graduate and undergraduate students rely on the Class 1,000 Clean Room as a primary experimental resource for the design and fabrication of nanoscale materials and devices. One of the key capabilities for micro and nanofabrication is the ability to create micro and nanoscale patterns in the device fabrication. UV lithography is normally used for the patterning in the device fabrication, where a spin coater is used to spin photo resist, and then a mask aligner system is required to align the patterns and make the UV light exposure for the device wafer fabrication. Currently, we have state-of-the-art thin-film deposition and e-beam lithography tools. However, the current mask aligner unit and spin coater are over 40 years old and donÕt function properly and serve the purpose for research and education. The requested mask aligner system and spin coater are necessary companion instruments to our 2,500 sq. ft class 1,000 clean-room fabrication tools. Through this proposal evidence is provided that acquisition of the mask aligner system and spin coater would propel nanoscale science and technology at AAMU serving northern Alabama to new frontiers. Impact on Research: Multiple research projects at AAMU require an advanced UV lithography capability. The research areas range from fabrication of energy-conversion materials and devices to nanoelectronic devices. The acquisition of the advanced mask aligner and spin coater unit will make these projects to be completed successfully, and will serve multiple faculty and student users. The research accomplishments will greatly benefit DoD and also the research community. Impact on Education: Acquisition of systems will not only aid advancing multiple research areas, many with applications that directly benefit society, but also enhance educational opportunities for both graduate and undergraduate students. The use of state-of-the-art instruments provides essential training to our majority underrepresented students who will become tomorrowÕs researchers in government, academia, and industries. Undergraduates will be exposed to the exciting and rich possibilities of nanofabrication through the research projects. High school teachers and students will be trained on the instrument. About 90% of the students trained with this instrument will be minority students.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Sep 20, 2018
- Source ID
- W911NF1610554
Entities
People
- Zhigang Xiao
Organizations
- Alabama A & M College
- Army Contracting Command
- Office of the Secretary of Defense