Magnetic Thick Films for Integrated Microwave Devices

Abstract

This research aims to (1) innovate self-biased microwave magnetic thick-films on semiconductor substrates, (2) integrate permanent magnet bias magnets on semiconductor substrates, and (3) demonstrate integrated microwave magnetic components on semiconductor substrates. The key innovations include ¥ Development of magnetic thick-film deposition methods (solution-based direct-write ÒprintingÓ methods and/or directed assembly) from hexaferrite nanoparticle precursors, which offer potential for rapid, large-area fabrication, lower-temperature processing, as well as high-performance microwave/mm-wave magnetic properties ¥ Advancement of high-energy-density, high-remanence, process-integrable permanent micromagnets to replace bulky external bias magnets with compact on-chip integrated bias magnets thereby facilitating integrated microwave components using a wide variety of magnetic materials (under bias) and traditional film deposition methods ¥ Demonstration of high-performance, fully microfabricated microstrip-fed circulator components integrated on semiconductor substrates with operating frequencies ranging from 1Ð110 GHz to showcase drastically improved SWAP compared to off-chip magnetic components.

Document Details

Document Type
DoD Grant Award
Publication Date
Feb 14, 2019
Source ID
W911NF1710050

Entities

People

  • David P Arnold

Organizations

  • Army Contracting Command
  • Defense Advanced Research Projects Agency
  • University of Florida

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Microwave Engineering.
  • Superconducting Magnet Technology

Technology Areas

  • Biotechnology
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems