Advanced Multilayer Physical Vapor Deposition Tool
Abstract
PI Maria requests ARO support for a physical vapor deposition tool for the production of multilayer material stacks for fundamental material property studies. The configuration proposed is designed specifically to propel the new NCSU-led MURI program ÒMulti-modal Energy Flow at Atomically Engineered InterfacesÓ but will also benefit a broad set of existing ONR, DoD, and NSF research programs. The feature capabilities present in this tool include: 1) High throughput deposition of metallic and oxide thin films using radio frequency (RF) and modulated pulsed power (MPP) plasmas Ð MPP are particularly interesting given their ability to promote high ionization fraction, and thus high deposition rates, full oxidation of metal cations in the reactive mode, and smooth terminal surfaces. 2) Efficient and rapid sample transfer between load-lock, growth, and anneal chambers to facilitate fast reproducible growths of complex structures, and broad distribution of samples to collaborators; 3) In situ thickness monitoring for films between 15 and 10,000 nm thickness Ð this is particularly important for achieving target thicknesses in a chamber where multiple magnetrons operate simultaneously, and whose individual power densities can alter deposition rates; 4) A magnetron configuration allowing a parent metal oxide, a candidate dielectric, a candidate acceptor, and a candidate donor to be accessible simultaneously; 5) An integrated annealing module to study interfacial reactions and to regulate defect chemistry by equilibration with the gas atmosphere over a pressure range from 10-8 Torr to 1 atmosphere and a temperature range from RT to 1000 ¡C. The instrumentation will enable the synthesis of inorganic thin films and multilayers with extreme-tight control of thickness, surface roughness, interface smoothness, adhesion, carrier concentration, electrical and optical properties. This instrument will introduce new capabilities to the Maria group that expedite synthesis and help exceed both material property and programmatic expectations. For Public Release
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Sep 11, 2018
- Source ID
- W911NF1710179
Entities
People
- Jon-Paul Maria
Organizations
- Army Contracting Command
- North Carolina State University
- United States Army