Tool for Direct Deposition and Characterization of Nano-optoelectronic Devices
Abstract
A new tool for direct deposition of material onto devices, and in situ optical and electrical characterization of the optoelectronic devices within a scanning electron microscope (SEM) environment is proposed. This novel tool is based on three main instruments we are requesting in this proposal: a compact SEM, nano-manipulators, and lasers. The novel material deposition modality is powered with the laser beam, and produces a focused beam of neutral precursor atoms and molecules. Its operation can be selected to be similar to the molecular beam epitaxy (i.e. thermal based) or pulsed laser deposition (i.e. ablation based). We anticipate the method to be capable of deposition of a wide range of material, including semiconductors, metals, and dielectrics. The spatial resolution will be limited by the material surface diffusion, and could be as small as ~100 nm. The proposed in situ nano-characterization modality is capable of positioning nano-objects, such as our nanosphere optical antenna, 2D material, and 1D nanowires with 1.5 nm resolution across ~2 centimeter field of operation. It is capable of simultaneous electrical and optical probing of nano-devices with a similar resolution and with four degrees of freedom (x, y, z, and rotation). Since the entire deposition and probing setups are within a dedicated SEM system, we can visually observe and control all modalities in real-time and ~3 nm resolution. The combination of probing, positioning, and deposition modalities Ð all with a few nanometers resolution - makes the proposed tool uniquely capable for many DoD related research. It can work with a wide range of existing tools at the PIÕs lab to achieve ultra-low noise and high-speed measurements on novel nano-opto-electro-mechanical devices right away. Also, the system is capable of significant enhancements with future funding, for example to include energy dispersive spectroscopy for direct material composition mapping.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Sep 11, 2018
- Source ID
- W911NF1710233
Entities
People
- Hooman Mohseni
Organizations
- Army Contracting Command
- Northwestern University
- United States Army