Ultrapure Reactive Ion Etching for Scalable Nanofabrication of Carbon-Based Semiconductor Quantum Devices

Abstract

Quantum computation and communication systems enable capabilities that are impossible in their classical counterparts. Impurities in diamond, such as the nitrogen vacancy (NV) color center, have emerged as a leading platform for solid-state spin qubits. High-fidelity logic gates, error correction, and long-range entanglement have already been demonstrated, but improved experimental techniques are required to enable scalable systems. In these solid-state systems, the quality of the substrate patterning is of utmost importance, as contamination leads to decoherence of quantum properties, lowering entanglement rates and decreasing fidelity. Here, we propose a carbon-only ultrapure reactive ion etching system for the scalable nanofabrication of carbon based semiconductor quantum devices, with a particular focus on nitrogen vacancy (NV) and silicon vacancy centers (SiV) in diamond. This system would greatly improve the quality of diamond nanophotonic devices coupled to atom-like quantum memories, and promises to enable the first scalable semiconductor-based quantum systems for which the entanglement rate of quantum registers is substantially faster than the decoherence rate. This project summary is publically releasable.

Document Details

Document Type
DoD Grant Award
Publication Date
Sep 11, 2018
Source ID
W911NF1710268

Entities

People

  • Dirk Englund

Organizations

  • Army Contracting Command
  • Massachusetts Institute of Technology
  • United States Army

Tags

Fields of Study

  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Quantum Computing
  • Quantum Science - Quantum Dots