Engineering Functional Surfaces and Flexible Smart Sensors by Scalable Microfabrication - Expansion of TAMUCC Facility and Capabilities to Polymeric Meta-Materials
Abstract
This proposal seeks to purchase a suite of equipment that will enhance existing micro fabrication capabilities at Texas A&M University Ð Corpus Christi to further advance our current and future research in support of Department of DefenseÕs science and technology development, and to further promote STEM education in Historically Black Colleges and University/Minority-serving Institution. These equipment will augment the existing capability at TAMUCC in the area of micro-fabrication, which include one ISO-1000 cleanroom, the only one in the south Texas area, and one semi-cleanroom that provide Si-based micro fabrication capacity such as photolithography, thin film deposit via sputtering and chemical vapor deposition, and dry etching by various Reactive Ionic Etching (RIE) processes. The existing capacity has already allowed us to advance our fundamental understandings of near-surface transports affecting friction and fouling processes and of electrical chemical processes of fuel cells; as well as the development of scalable microfabrication techniques in naval applications. Built on this solid foundation, a team with expertise in material science, fluid mechanics, robotics, nanophotonics and chemical engineering is formed to advance our research with the proposed enhanced capabilities. In this project, a suite of tools is requested with a focus on extending our existing Si-based capability to polymeric and metal-dielectric meta-material. The equipment can be subdivided into three categories: material deposition, processing, and characterization, with the same underlying theme. In material deposition, we seeks to enhance our ability in generating nano-scale electrodes, electronics over polymer substrates by requesting a thermal evaporator; whereas in material processing, a Deep Reactive Ionic Etch with chlorine-based processes are requested to enhance our ability in designing and fabricating nanostructure surfaces/devices directly out of polymers. With these tools, we can push the scale limits down to submicron and nanometer. An Atomic Force Microscope is also requested to characterize these structures and devices. PIs expect to advance the research inline with DoD interests, more specifically with Army Research Office (ARO) and Office of Naval Research (ONR). Included are (i) scalable nanofabrication techniques for flexible sensor, wearable devices, printable ammunitions; (ii) bio-inspired functional naval surfaces and coatings for drag reduction, antifouling, as well as flexible smart sensor-mats; (iii) Sensing and manipulation of nanostructures. The equipment compounded by research buildups at TAMUCC will push existing research boundaries and promote interdisciplinary collaborations especially between engineering and marine science at TAMUCC. On a smaller scale, the acquisition will help our effort to deepen our understanding of nanoscale physics and to further the development of nanotechnology. On a grand scale, it will enhance TAMUCCÕs research ability and lay the foundation to become a research intensive university and education leader in south Texas. Broad Impact: Research Enhancement: The acquisition will transform the landscape of engineering research at TAMUCC and subsequently that of south Texas area by providing cutting edge facility and equipment. This will enable many research performed at TAMUCC and surrounding HBCM/MSI institutions. It will no doubt to push the envelope of regional research. STEM Education: PIs will leverage the acquisition and existing facility to enhance STEM education by organizing short training courses, enhancing the curriculum with topic oriented electives, and involving undergraduates especially minorities in research projects. Outreach: PIs will utilize this acquisition and existing facility to develop summer camps for K-12 teachers in the region to introduce nanotechnology and to promote K-12 STEM education.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Sep 20, 2018
- Source ID
- W911NF1710371
Entities
People
- Jian Sheng
Organizations
- Army Contracting Command
- Office of the Secretary of Defense
- Texas A&M University–Corpus Christi