Acquisition of an Electron Beam Lithography System for Enhancing Research and STEM Education in Nanophotonics and Biophysics
Abstract
The main goal of this proposal is to acquire an Electron Beam Lithography system (EBL, PIONEER TWO, Raith America, Inc.) to enhance research and STEM education capabilities in nanophotonics and biophysics in the predominantly Hispanic Rio Grande Valley (RGV) area of South Texas. The projects in nanophotonics and biophysics under this proposal will introduce new competitive research directions with potential applications in support of the U.S. Defense Mission. The proposed instrument will be the first nanopatterning instrument in South Texas and will be installed at the Brownsville campus of the University of Texas Rio Grande Valley (UTRGV). The PIONEER TWO is the first true direct write and direct view system enabling both ultra-high- resolution EBL and Scanning Electron Microscope (SEM) imaging. The instrument contains a Laser Interferometer Controlled Stage which delivers positioning and pattern placement accuracies of 2 nm, which is important to both EBL and SEM systems for pattern placement, stitching and overlay, and large area patterning/imaging with the highest precision. The instrument guarantees sub-8 nm lithography and 1 nm imaging resolution. The patterns in the proposed nanophotonics and biophysics projects require a subwavelength structure in visible or infrared light which is between a few hundred nm to 500 nm. These nanoscale patterns cannot be fabricated by photolithography instruments, only by the EBL instrument. The PIONEER TWO will be used to develop nanophotonic devices including multifunctional polaritonic metasurfaces, carbon-based nanostructures, micro-ring resonators, and single-domain memory devices which will benefit development of a superior performance imaging and sensing system in the airborne and space environment. In addition, the instrument will realize single-molecule detection using nanostructures which carries a significant promise to improve imaging to resolve hidden biological events in human cells. Therefore, the acquisition of the EBL system is critical to the success of the proposed projects. The EBL system will become an essential element in advanced research training and hands-on experience for graduate and undergraduate students in STEM fields, giving them a competitive advantage for their future careers. Existing UTRGV summer STEM programs for high school students and teachers will be richer with tailored training programs by this project team which will expose the participants to nanoscience through the lens of the state-of-the-art EBL instrument and other, complementary nanoscience instruments already at the university. The acquisition of the EBL system will satisfy a great demand in the regional nanoscience community because this will be the first nano-/micro-lithography system in South Texas, a region of approximately 5 million residents. UTRGV has grown its potential for nanoscience and nanotechnology research by attracting highly competitive faculty members in nanoscience and biomedical fields and constructing research infrastructures. The EBL system will play a major role in extending this effort which will eventually benefit Hispanic students in South Texas in learning and preparing for their future careers in STEM.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Aug 19, 2019
- Source ID
- W911NF1910454
Entities
People
- Myoung-hwan Kim
Organizations
- Army Contracting Command
- Office of the Secretary of Defense
- University of Texas Rio Grande Valley