Acquisition of Equipment for Processing of Micro- and Nano-Scale Devices
Abstract
This request to the Department of Defense is for the acquisition of a suite of tools to provide processing of micro- and nano-scale materials and devices at Tennessee State University (TSU). These tools will be used to complement existing tools and expand the research capabilities of the TSU Center for Micro-, Nano-, and Bio-Technology Research (CMNBTR) at TSU. The applications of the processes and devices developed will be for corrosion sensing and infrared detection needs, which are two critical areas for the Department of Defense. Further, the expansion of the CMNBTR will help establish the foundation of a strong research and training program in these areas at TSU. Thus, a cadre of minority students will be equipped and prepared for jobs or pursuit of graduate degrees in these emerging fields in STEM areas including, electrical engineering, mechanical engineering, computer science, and chemistry. The equipment requested in this proposal provide for a suite of tools that can be used to grow and pattern films for device fabrication. The tools include: a spin coater to spin cast polymers on device substrates; a mask aligner to pattern the substrate materials; a wet processing sink and hood to provide for wet processes such as etching, cleaning, rinsing, development, etc. using wet chemistry; a profilometer for characterizing the surface (thickness) of materials grown; an ellipsometer to characterize the dielectric properties of thin films; a deposition tool to deposit thin films; and a modular cleanroom enclosure to provide for a ÔcleanÕ/low particulate space within the Ônon-cleanÕ laboratory for processing micro- and nano-scale devices with nano-scale features. Acquisition of these tools will enable fabrication of micro-devices. Further, this equipment will enhance the research and training initiatives in the areas of areas of 1.) microsensor fabrication for corrosion monitoring and bio-chemical agent monitoring/assessment and 2.) development of plasmonic nanostructures for the enhanced infrared detection in MCT films. Moreover, such research and training is aligned with research of various DoD agencies, including the Office of Naval Research (ONR) and the Army Research Office (ARO). The broader impact of the acquisition of this suite of equipment will be the education and training of a new generation of minority and underrepresented scientists and engineers in the areas of micro- and nano-scale devices and materials, as well as nano- and biotechnology. During the 21st Century, the population of the United States will become more culturally diverse than in any period of our nationÕs history. Therefore, the talent and skills of women and underrepresented minorities must be included in the skilled and technical workforce. The acquisition of such equipment will provide access to state-of the-art microfabrication equipment to students at a minority serving institution. Thus, it will not only facilitate necessary training on the undergraduate level, but it will also increase the pipeline of underrepresented minority students pursuing Ph.D.s in Science, Technology, Engineering, and Mathematics (STEM) areas.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Aug 19, 2019
- Source ID
- W911NF1910471
Entities
People
- Francis Williams
Organizations
- Army Contracting Command
- Office of the Secretary of Defense
- Tennessee State University