Development of Multifunctional Flexible Piezoelectric Materials for MEMS Applications

Abstract

The overall aim of this project is to develop a new class of multifunctional smart polymer materials that are compatible with standard microfabrication manufacturing methods. The project focuses on piezoelectric materials, which convert mechanical energy into electrical energy or vice versa. Currently, piezoelectric materials are widely used in numerous micro-scale devices both commercially and for DoD applications such as ultrasound transducers, sensors (gas, humidity, acceleration, vibration, medical), RF filters and microphones. However, most microfabrication compatible piezoelectrics are stiff inorganic materials that do not meet the mechanical demands for wearable/implantable technology (infantry), robotic tactile sensors/actuators, transducers for (autonomous vehicles and drones), underwater sonar, or portable bio/chemical sensors. Current polymer piezoelectric materials have numerous disadvantages that limit their integration into these micro-devices including low thermal, low piezoelectric, and poor acoustic velocity properties. Low thermal properties prevent the materials from being manufactured into micro-scale devices which require elevated temperature processing steps. In addition, each piezoelectric material has advantages and disadvantage which make them uniquely ideal for specific applications. Therefore, there is a need to develop a new class of piezoelectric polymers that is mechanically flexible, able to withstand elevated temperatures required for micro-scale manufacturing, and contain enhanced multifunctional properties tailored to specific DoD related applications. The methodology to develop this new class of piezoelectric polymers includes 1) transforming current compatible polymers into piezoelectric materials and 2) enhancing thermal and multifunctional properties of current polymer piezoelectric materials. This will be accomplished though experimental validation which will lead to developing a fundamental understanding of the material properties at the molecular level. The project will develop new multifunctional materials based on molecular scale modification of various piezoelectric polymer classifications: i) development of a novel bulk piezoelectric polymer by modifying the crystal structure and crystallinity to enhance piezoelectric properties, ii) create novel 0-3 and 1-3 nanocomposite materials using inorganic piezoelectric particles embedded in a polymer matrix, where various fillers will be used to enhance and tailor specific material properties, iii) development of a hybrid material consisting of stacks of polymer piezoelectrics and inorganic piezoelectrics. The creation of a new class of polymer piezoelectrics will give design engineers a new capability that is currently not feasible, which will allow them to integrate the material into new micro-scale device technology, such as enhanced sonar devices, advanced wearable sensors, smart contacts, implantable devices, smarter robotics with advanced feedback, and advanced flexible displays and communications. The project will train the next generation of underrepresented students in material science and advanced micro-scale technology. Outcomes of the research will be used to promote multidisciplinary background requirements for modern STEM careers and motivate future students to pursue STEM based education/training. Applied engineering training within the project will provide students with necessary skills required to succeed in academia or industry.

Document Details

Document Type
DoD Grant Award
Publication Date
Aug 31, 2020
Source ID
W911NF2010312

Entities

People

  • Nathan Jackson

Organizations

  • Army Contracting Command
  • Office of the Secretary of Defense
  • University of New Mexico

Tags

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.
  • Nanocomposite Materials Science

Technology Areas

  • AI & ML
  • Autonomy