Acquisition of a Mask Aligner with Nanoimprint Capability for Integrated Photonics Research and Nanotechnology Training
Abstract
Intellectual Merit This request to the Department of Defense is for a photolithography mask aligner with nanoimprinting capability, which will be a major piece of equipment required for the enhancement of the Virtual Parts Engineering Research Center (VPERC) at Hampton University. The VPERC was established in 2001 with funding provided by the Army Research Office as a collaborative effort between Hampton University, Arizona State University, and the University of Utah to develop innovative processes for replacing legacy weapons system parts to support the warfighter in the field. Complimentary equipment for photolithography already exists at Hampton University; including spin coaters for applying photoresist to samples or wafers, metal deposition systems (evaporation and Sputtering), and ovens and hotplates for pre-baking and post-baking before and after UV exposure. The acquisition of a mask aligner/nano-imprinter would be the final piece of equipment needed to provide Hampton University with photolithography capability. This capability would equip faculty members with the tools necessary to fabricate optoelectronic, microelectronic, microfluidic, and optofluidic devices for various applications. Specific research areas addressed in the enhanced VPERC facility will include Optofluidic Microsystem, Structural Health Monitoring, and 3D Integrated Photonics. The research led by the School of Engineering and Technology will be conducted in a collaborative fashion with the School of Science. Thus, we expect the collaborative efforts among faculty would increase research synergies regarding fabrication techniques and device design. In addition, an existing undergraduate Nanotechnology course will be greatly enhanced by the development of new hands-on laboratory modules enabled. The modules will include fundamentals of semiconductor fabrication technology with topics such as semiconductor substrates, microfabrication techniques, and process integration. Broader Impact The larger impact of the acquisition of an MA/BA6 mask aligner and the enhancement of the VPERC at Hampton University will be the education and training of a new generation of scientists and engineers who will replace retiring personnel at the Office of Naval Research (ONR), the Army Research Office (ARO), and Air Force Office of Scientific Research (AFOSR) sponsored laboratories and research and development centers associated with the Department of Defense (DoD). During the 21st Century, the population of the United States will become more culturally diverse than in any period of our nationÕs history. In order for the national defense and security of the United States to remain strong, the talents and skills of women and underrepresented minorities must be included in the skilled and technical workforce. We believe that the establishment of micro/nanofabrication training at Hampton University will be central to areas of research interest to the ONR, ARO and AFOSR. Furthermore, the engineering faculty will be able to increase collaborative research efforts with other universities. Within the School of Engineering and Technology there is active collaboration with researchers at Brandeis University, University of California, Irvine, and the Georgia Institute of Technology in the area of Microfluidics, Biophotonics, and 3D Integrated Photonic Packaging. Moreover, the establishment of microfabrication capabilities at Hampton University ensures further participation with these institutions and eliminates the barriers of Hampton taking a leading role in future grants as well as in the establishment of multi-institution research centers.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jun 25, 2021
- Source ID
- W911NF2110271
Entities
People
- Demetris Geddis
Organizations
- Army Contracting Command
- Hampton University
- Office of the Secretary of Defense