Multifunctional High Performance Smart Thin Films for Microsystem Applications
Abstract
The overall aim of this project is to develop a new class of stackable multifunctional thin films with enhanced performance that are compatible with standard microfabrication manufacturing methods. The project focuses on developing both piezoelectric and magnetostriction materials as well as a multifunctional materials. Currently, both transduction mechanisms are extensively used in Microsystems devices for DoD applications such as ultrasound transducers, sensors (gas, humidity, acceleration, vibration, medical, magnetic field), robotics, communications, and propulsion systems etcÉFunctional piezoelectric and magnetostriction materials have two major challenges associated with thin films 1) low functional properties (both piezoelectric and magnetic properties are significantly reduced in thin films) and 2) microfabrication compatibility, most high performance functional materials are not compatible with standard microfabrication manufacturing. Flexible/stretchable functional materials are also in high demand for applications in wearable technology (infantry), robotic e-skin, sensors/actuators for autonomous vehicles and drones, underwater sonar, and bio/chemical sensors. However, most flexible functional materials have low thermal requirements which limits their integration into microfabrication process. A simplistic method to enhance functional properties is to create stacked film structures. However, creating multi-layer structures is challenging as it requires polarity and alignment control for both piezoelectric and magnetic materials. Therefore, there is a need to develop a new class of multifunctional thin film materials that is microfabrication compatible and contain enhanced multifunctional properties tailored to specific DoD related applications. The methodology to develop this new class of compatible stackable multifunction films involves investigating both ceramic and flexible polymer composite based thin films. We will experimentally investigate new alternative transition metal dopants to create ternary alloyed AlN that are more stable, have ferroelectric properties, and high piezoelectric properties than ScAlN, which is based on density functional theory predictions. Currently, AlN-based piezoelectrics are limited to single layer films which reduces their piezoelectric efficiency. This proposal will use the recently discovered ferroelectric properties of doped AlN to control polarity of the films to create a multiple stacked layer structure to increase piezoelectric performance. The project will also focus on development of novel flexible polymer composite functional films fabricated from microfabrication compatible materials. Both piezoelectric and magnetostriction nanoparticles will be embedded in a photodefinable polymer matrix. The project will investigate methods to enhance understanding of how to modify both the polymer matrix and nanoparticles to increase functional performance, as well as investigating manufacturing methods to control alignment and polarity to enhance performance. Unique manufacturing methods will be implemented to enhance bulk film properties to prevent agglomeration and percolation within the film. Multiple nanoparticles will be integrated into the films to create new multifunctional films that can be tailored to specific Microsystem applications and stacked for enhanced performance. The project will train the next generation of underrepresented students in material science and Microsystems. Outcomes will promote the need for multidisciplinary education and motivate students to pursue STEM education/training that will provide students with skills to succeed in academia or industry.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- May 24, 2023
- Source ID
- W911NF2310171
Entities
People
- Nathan Jackson
Organizations
- Army Contracting Command
- Office of the Secretary of Defense
- University of New Mexico