Microscale Plasma Devices (MPD)

Abstract

The goal of the Microscale Plasma Devices (MPD) program was to design, develop, and characterize MPD technologies, circuits, and substrates. The MPD program focused on development of fast, small, reliable, high carrier-density, micro-plasma switches capable of operating in extreme conditions, such as high-radiation and high-temperature environments. Specific focus was given to methods that provide efficient generation of ions that can perform robust signal processing of RF through light electromagnetic energy over a range of gas pressures. Applications for such devices are far reaching, including the construction of complete high-frequency plasma-based circuits, and microsystems with superior resistance to radiation and extreme temperature environments. MPDs were developed in various circuits and substrates to demonstrate the efficacy of different approaches. MPD-based microsystems are demonstrated in DoD applications where electronic systems must survive in extreme environments. The Basic Research part of this effort focused on fundamental MPD research to advance scientific knowledge based on the study of several key MPD design parameters. These parameters included ultra-high pressure and high carrier density regimes. MPD focused on expanding the design space for plasma devices enabling revolutionary advances in micro-plasma device performance. MPD developed innovative concepts and technologies that are clearly disruptive with respect to the current state of the art in terms of switching speed (less than 100 picoseconds), carrier density (exceeding 1E18 per cubic centimeter), and capable of operation and robustness in extreme high-radiation or high-temperature (600degC) environments. Fundamental scientific knowledge derived from MPD is also expected to drive developments in commercialization of MPD technology developed and funded in PE 0602716E, Project ELT-01.

Document Details

Document Type
Accomplishment
Publication Date
Oct 01, 2017
Source ID
a48f275f1794f87d0a1cb6ac191ef0b5

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Plasma Physics.

Technology Areas

  • Microelectronics
  • Space
  • Space - Hall-Effect Thruster

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