Information Tethered Microscale Autonomous Rotary Stages (ITMARS)
Abstract
(U)Early MEMS work had demonstrated many ways of realizing rotating micromotors, and in fact had been the source of major popular interest in the field of micromachines. However, the unique capability to precisely rotate micromachined structures in a controllable manner has been under-utilized in MEMS systems. Although the use in micromotors for optical and mechanical switches has been demonstrated, most applications passively use the structures fabricated into the rotary stage. To date there is no technology able to transmit power and signals to these tiny stages from the substrate on which they are rotating. This program will explore ways at pushing the envelope by engineering ways of coupling power and signals to a rotating MEMS stage, and measuring its position with much higher accuracy then possible at the macroscale. With this capability, arrays of rotating 100-1000 micron diameter stages could carry various sensors that can be aimed at any azimuth and inclination, and can be rotated 360 degrees for cancelling angle dependent biases. Examples of sensors that might utilize this capability include microphones, antennas, radiation sensors, etc. Although many of these sensors exist, by adding the rotating stage functionality without increase in sensor/system size, weight, and power, one can really see the benefit of integrating MEMS with traditional sensors. The program will transition via industry performers.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2011
- Source ID
- aef7f9817f1c38b27cb4a1e1704c29f2