Microscale Plasma Devices
Abstract
The Microscale Plasma Devices program will develop microscale plasma devices for the efficient, high pressure (up to or even including atmospheric pressure) generation of ions, radiofrequency energy, and light sources. Applications for such devices are far reaching, including the construction of complete high-frequency logic circuits, and integrated circuits with superior resistance to radiation and extreme temperatures. The Basic Research part of this effort will focus on microelectronic interconnects necessary for operating plasma devices at elevated pressures. This program also has efforts funded in PE 0602716E, Project ELT-01.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2012
- Source ID
- f5ed1c7e6217b3f8caccd6a2e648d7bc