MEMS Exchange
Abstract
(U)The MEMS Exchange program seeks to provide flexible access to complex MicroElectroMechanical systems (MEMS) fabrication technology in a wide variety of materials and to a broad, multi-disciplinary user base via the MEMS Exchange service. A major goal of the effort is to ensure self-sustained operation of MEMS Exchange after the end of the program by adding several process modules to the existing repertoire and increasing the number of processes run per year to raise revenues to the point of self-sufficiency. Among the future payoffs of this program is the establishment of an accessible infrastructure for low or medium volume production of MEMS-enabled products for DoD applications. The goal of the MEMS Exchange program is to provide MEMS fabrication services to all levels of industry and academia in support of Army, Navy, Air Force, and other DoD requirements without further DARPA sponsorship.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2011
- Source ID
- f9aea5a432ea41410b34dc552dc4487e