FABRICATION OF GLASS MASKS, AND THEIR APPLICATION TO THIN-FILM CIRCUIT DEPOSITION
Abstract
This report describes a process which has been developed for the etching of glass masks. A discussion of the requirements for these masks in thin-film circuit deposition precedes a detailed description of the process. Six masks were produced by the process, and measurements were made to determine the tolerances obtained.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1965
- Accession Number
- AD0464486
Entities
People
- P. Everett
- R. Roderick
Organizations
- MITRE Corporation