Fundamental Studies of Semiconductor Heteroepitaxy (Part 2)
Abstract
;Contents: Studies of in situ film growth in the electron microscope; Electrical properties of heteroepitaxial films; Anisotropy in electrical properties of Si films on Al2O3; Miscellaneous structural evaluations of heteroepitaxial semiconductor films; Design and fabrication of special devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1973
- Accession Number
- AD0767288
Entities
People
- A. J. Hughes
- Arthur C. Thorsen
- Harold M. Manasevit
- Joseph L. Kenty
- Ralph P. Ruth