Fundamental Studies of Semiconductor Heteroepitaxy (Part 2)

Abstract

;Contents: Studies of in situ film growth in the electron microscope; Electrical properties of heteroepitaxial films; Anisotropy in electrical properties of Si films on Al2O3; Miscellaneous structural evaluations of heteroepitaxial semiconductor films; Design and fabrication of special devices.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1973
Accession Number
AD0767288

Entities

People

  • A. J. Hughes
  • Arthur C. Thorsen
  • Harold M. Manasevit
  • Joseph L. Kenty
  • Ralph P. Ruth

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Crystal Structure
  • Diffraction
  • Electromagnetic Fields
  • Energy Bands
  • Epitaxial Growth
  • Fabrication
  • Geometry
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Photoelectric Emission
  • Semiconductor Devices
  • Semiconductors
  • Solar Cells
  • Temperature Gradients
  • Transport Properties

Fields of Study

  • Materials science

Readers

  • Business Analytics
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene