INVESTIGATION OF RELIABILITY TESTING AND PREDICTION TECHNIQUES FOR INTEGRATED CIRCUITS
Abstract
The work is divided into four parts: (1) data analysis and preliminary tests to determine failure mechanisms for early direction in the study; (2) a physics of failure program consisting of fundamental oxide studies, metal contact and interconnection evaluations, and circuit analysis; (3) a test program including data and failure analysis and consisting of two major segments; and (4) the development of a reliability screening procedure for integrated circuits. Three computer programs, SERF, LINDA 1 and LINDA 2 were written to assist in the analysis of data. The physics of failure program consisted of fundamental surface studies to produce stable metal-oxide-silicon (MOS) systems, circuit analysis of the SN5420 integrated circuit, and a study of the molybdenum-gold expanded contact system.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1967
- Accession Number
- AD0818377
Entities
People
- D. R. Fewer
- S. F. Musket
- W. L. Gill
- W. L. Workman
Organizations
- Texas Instruments