System for Fabrication and Characterization of Meta-infrared Devices
Abstract
The University of New Mexico proposed to purchase a system for the fabrication and characterization of nanophotonic meta-infrared (IR)devices. Meta-IR devices involve the integration of metamaterial structures with IR devices, such as detectors, lasers and modulators, toprovide a new class of functionality including introduction of color, polarization and gain into individual pixels. Prof. Sanjay Krishna'sgroup plans to establish research program of novel nanophotonic meta-IR devices at the Center for High Technology Materials (CHTM). Successful realization of this program requires integration of several components, namely, design and growth capabilities, nanoscalefabrication, microscopic characterization, and system integration with fan outs and read-out integrated circuit (ROIC). The cleanroom at CHTM lacked the ability to fabricate and characterize large scale nanostructures with random patterns and sub-micron resolution which is critical for nanophotonic devices, in general and meta-infrared devices in particular. To address this deficiency, Prof. Krishna proposed tobuy unique combined system of a Nano Imprint Lithography (NIL) toolset for the fabrication of the meta-IR devices and an Infrared Imaging Microscope (IIM) for the radiometric characterization of the fabricated devices. The MA6/BA6 Nano Imprint Lithography (NIL)Toolset and the Infrared Imagine Microscope are delivered and installed in the CHTM cleanroom and PI's lab, respectively.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 19, 2015
- Accession Number
- AD1001067
Entities
People
- Alireza Kazemi
- Sanjay Krishna
Organizations
- University of New Mexico