MEMS Gate Structures for Electric Propulsion Applications
Abstract
A MEMS gate prototype is under development to extract and accelerate charged particles for use with field emission cathodes and the nanoparticle field extraction thruster at the University of Michigan. Preliminary simulations suggest the desirability of a unity aspect ratio in the emission channel design to achieve electric field uniformity. Low emission threshold cubic boron nitride films have been grown, and gated testing with these films along with carbon nanotubes is in progress.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 12, 2006
- Accession Number
- AD1006150
Entities
People
- Alec D. Gallimore
- Brian E. Gilchrist
- Codrin N. Cionca
- David P. Morris
- Roy Clarke
- Thomas M. Liu
Organizations
- University of Michigan