Equipment for Topographical Preparation and Analysis of Various Semiconductor Infrared Detector Samples
Abstract
A used calibrated surface profilometer (Dektak 3) and a refurbished photoresist spin coater (CEE 200X) was purchased to supplement our U.S. Army Research Office (ARO) grant W911NF-12-2-0035, Band-Offset Characterizations of Semiconductor Heterojunctions. These two instruments has met our immediate need to perform the etching and deposition of metal contacts for our detector samples in-house which helped us process the detector samples. The profilometer allowed us to precisely monitor the etched depth in the processed samples especially when we need to identify the issues related to unexpected impedance values of the devices. Although not supported by this grant, undergraduates, graduate students and postdocs used these instruments to learn processing steps related to device development.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 13, 2015
- Accession Number
- AD1010362
Entities
People
- A. G. Perera
Organizations
- Georgia State University