Equipment for Topographical Preparation and Analysis of Various Semiconductor Infrared Detector Samples

Abstract

A used calibrated surface profilometer (Dektak 3) and a refurbished photoresist spin coater (CEE 200X) was purchased to supplement our U.S. Army Research Office (ARO) grant W911NF-12-2-0035, Band-Offset Characterizations of Semiconductor Heterojunctions. These two instruments has met our immediate need to perform the etching and deposition of metal contacts for our detector samples in-house which helped us process the detector samples. The profilometer allowed us to precisely monitor the etched depth in the processed samples especially when we need to identify the issues related to unexpected impedance values of the devices. Although not supported by this grant, undergraduates, graduate students and postdocs used these instruments to learn processing steps related to device development.

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Document Details

Document Type
Technical Report
Publication Date
Nov 13, 2015
Accession Number
AD1010362

Entities

People

  • A. G. Perera

Organizations

  • Georgia State University

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Calibration
  • Cameras
  • Control Knobs
  • Department Of Defense
  • Detectors
  • Engineering
  • Heterojunctions
  • Infrared Detectors
  • Measurement
  • Metal Contacts
  • Military Research
  • Quantum Dots
  • Semiconductors
  • Standards
  • Students
  • Video Cameras
  • Video Images

Readers

  • Nanofabrication and Microfabrication.
  • Research Science/Academic Research
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene