Nanoelectronics Development and Fabrication

Abstract

The objective of this effort was to leverage research and development (R and D) investments by New York State and over 300 leading nanoelectronics companies and research institutions at SUNY Polytechnic Institute to developed a process flow for fabricating resistive memory devices (aka: memristors) utilizing a range of different so-called switching oxides as the active layer in these devices. After developing and optimizing the process flow, a series of 100 mm wafers containing these devices were fabricated and delivered to AFRL for testing.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2018
Accession Number
AD1054332

Entities

People

  • Nathaniel C Cady

Organizations

  • SUNY Polytechnic Institute

Tags

DTIC Thesaurus Topics

  • Air Force
  • Air Force Research Laboratories
  • Electron Microscopy
  • Engineering
  • Fabrication
  • Field Effect Transistors
  • Gas Flow
  • Materials
  • Measurement
  • Memory Devices
  • Memristors
  • Metal Oxides
  • Microscopes
  • Microscopy
  • Nanoscale Devices
  • New York
  • Oxides
  • Patent Applications
  • Resistance
  • Semiconductors
  • Switching
  • Transistors

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.