Segmented Control of Electrostatically Actuated Bimorph Micromirrors

Abstract

Electrostatic actuating bimorph beams are a MEMS device that can be used to control arrays of small micromirrors for optical scanning. Previous research has demonstrated that creating high-angle deflection using long repeating arms of bimorph beams is possible. The current devices lack precise control and measurement of the mirror deflection. A solution to improve control and measurement by using segmented bias channels to control separate portions of the actuation arm. The amount of mirror deflection will vary depending on which segments of the arm are actuated. This poster discusses the results of FEA modeling and testing.

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Document Details

Document Type
Technical Report
Publication Date
Mar 23, 2018
Accession Number
AD1056223

Entities

People

  • Kullen W Waggoner

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Assembly
  • Band Gaps
  • Band Structures
  • Beam Steering
  • Chemical Reactions
  • Chemical Vapor Deposition
  • Dielectric Permittivity
  • Energy Bands
  • Fabrication
  • Geometry
  • Manufacturing
  • Materials
  • Measurement
  • Mechanical Properties
  • Microelectromechanical Systems
  • Micromachining
  • Modal Analysis
  • Nanoelectromechanical Systems
  • Reliability
  • Resonant Frequency
  • Semiconductors
  • Solid State Physics

Fields of Study

  • Physics

Readers

  • Robotics and Automation.
  • Structural Dynamics.