Research on InGaAs FET's.
Abstract
Virtually the whole effort for this period was spent in trying to grow by Vapor Phase Epitaxy (VPE) dislocation-free InGaAs on GaAs at In percentages above 25%. Of all the techniques tried, significant improvement came only after installation of a H2 bypass on the reactor. Field Effect Transistors (FETs) fabricated on the best of the pre-H2 bypass wafers showed sub-GaAs values for the effective saturated velocity, and FETs have yet to be fabricated on the wafers grown with the H2 bypass. Efforts at ion-implanting the pre-H2 bypass wafers were not successful, presumably because of the heavy amount of dislocations in the material. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1979
- Accession Number
- ADA078816
Entities
People
- C. Nishimoto
- R. Fulks
- S. Bandy
- Salman M. Hyder
- T. Boyle