Etching Studies on Singly and Doubly Rotated Quartz Plates

Abstract

Experiments aimed at finding a chemical polish for the doubly rotated SC-cut have been performed with a variety of etchants. The surface morphologies of etched SC-cut plates depend strongly on the composition of the etching solutions. Some of the solutions evaluated did not produce chemical polishing on either side of the SC-cut plates, some produced chemical polishing on one side but not the other, and some were able to polish both sides. It has also been shown that at least up to 10 MHz, the chemical polishing does not produce a significant 0 degradation for AT-cut quartz crystal resonators.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1980
Accession Number
ADA081729

Entities

People

  • John R. Vig
  • Raymond L. Filler
  • Ronald J. Brandmayr

Organizations

  • United States Army Communications-Electronics Command

Tags

Communities of Interest

  • Biomedical

DTIC Thesaurus Topics

  • Air Gaps
  • Aluminum Oxides
  • Chemistry
  • Crystals
  • Degradation
  • Electron Microscopy
  • Electronics
  • Frequency
  • Partial Pressure
  • Polishes
  • Polishing
  • Quartz Resonators
  • Resonators
  • Roughness
  • Shock Resistance
  • Surface Roughness
  • Topography

Readers

  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.