SEM Analysis Techniques for LSI Microcircuits. Volume 1

Abstract

Scanning Electron Microscope (SEM) Applications were developed and demonstrated for determining circuit configuration and organization. These applications employ voltage contrast and Electron Beam Induced Current (EBIC) techniques. Procedures were developed utilizing these applications to evaluate semiconductor memory circuits. These procedures provide practical methods for developing die maps, electrical circuit schematics, logic diagrams, device block diagrams and memory array bit maps. The SEM data are used in conjunction with light microscopy data to provide significant improvements in device characterization.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1980
Accession Number
ADA090922

Entities

People

  • D. D. Wilson
  • J. R. Beall
  • W. E. Echols

Organizations

  • Martin Marietta

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Current Amplifiers
  • Digital Circuits
  • Electrical Circuits
  • Electron Beams
  • Electronics Laboratories
  • Integrated Circuits
  • Inverter Circuits
  • Logic Gates
  • Memory Devices
  • Microscopy
  • Modules (Electronics)
  • Plastic Explosives
  • Power Electronics
  • Power Supplies
  • Semiconductor Devices
  • Semiconductors
  • Square Waves

Readers

  • Business Analytics
  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Directed Energy
  • Microelectronics