Semiconductor Technology Program - Progress Briefs.
Abstract
Contents: Cross-Bridge Sheet Resistors; Laser-Induced Surface Patterns; Analysis of PVW Data; Optical Linewidth Measurements; Linewidth Measurement Seminars; Moisture Measurement Workshops; Update - Film Thickness Standards; Erratum - NBS Spec. Publ. 400-61; Recent Publications; Publications in Press.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1981
- Accession Number
- ADA098029
Entities
People
- W. Murray Bullis
Organizations
- National Institute of Standards and Technology