Ultraviolet Enhanced Deposition from Pentacarbonyl-Iron on Gallium Arsenide, Quartz, and Sapphire.

Abstract

This report assesses the potential utilization of organo-metals in the thin-film deposition of metals, semiconductors, and insulators onto various substrates. The emphasis is on the particular advantages of the ultraviolet photolysis of organometals using incoherent light for low temperature, wide-area deposition of thin films. Experimental results on the photolysis and pyrolysis of pentacarbonyl-iron on gallium arsenide, quartz, and sapphire are reported. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1981
Accession Number
ADA116800

Entities

People

  • N. Bottka
  • Phoebe Walsh

Organizations

  • Naval Air Weapons Station China Lake

Tags

Communities of Interest

  • Advanced Electronics
  • Weapons Technologies

DTIC Thesaurus Topics

  • Chemical Reaction Properties
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Decomposition
  • Dielectrics
  • Dissociation
  • Gallium Arsenides
  • Ionization
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Semiconductors
  • Three Dimensional
  • Vapor Deposition
  • Vapor Pressure

Readers

  • Organic Chemistry
  • Semiconductor Device Technology
  • Wave Propagation and Nonlinear Chaotic Dynamics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene