Micro-Reactions of Metal Contacts on Various Types of GaAs Surfaces.
Abstract
An XPS and ISS analysis of a range of GaAs surfaces is reported which are produced by various technological steps such as etching in basic or acidic solutions as costumary before the deposition of metals. Studies on the light emission for reverse biassed Schottky contacts has resulted in a better understanding of the influence of preevaporation etchants on this emission. First results of lateral material transport between co-planar electrodes and on Metal-GaAs interdiffusion due to typical operational device conditions are presented. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1984
- Accession Number
- ADA139412
Entities
People
- E. Huber
- H. L. Hartnagel
- J. Wuerfl
- K. H. Kretschmer
- K. Roehkel