Investigation of Sheath Phenomena in Electronegative Glow Discharges.

Abstract

Two different methods of analyzing the cathode fall region of low pressure glow discharges were developed and applied to three different electronegative gas mixtures. One method was based on a self-consistent numerical solution to Poisson's equation, the current continuity equations for electrons and negative ions, and the current conservation equation. This method assumes the electrons are always in equilibrium with the electric field. The other method was based on a self-consistent numerical solution of the Boltzmann transport equation for electrons, Poisson's equation, and the current conservation equation. This method allows the electrons not to be in equilibrium with the field. Comparing these two methods revealed that nonequilibrium prevails throughout the cathode fall region. The electronegative gas mixtures investigated were small concentrations (less that 10%) of hydrogen chloride in helium, argon, or xenon. The electric field, Townsend ionization and attachment coefficients, electron and negative ion current densities, and electron, positive ion, and negative ion number densities are plotted as functions of distance through the cathode fall region. Discharge current densities, cathode fall lengths, and voltages are compared to other theoretical and experimental data through a scaling relationship. The experimentally observed contraction of the cathode fall length in electronegative gases with helium as a buffer is described. This effect is not predicted for electronegative gas - argon or - xenon mixtures. The negative glow and anode fall are also briefly discussed.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1985
Accession Number
ADA162416

Entities

People

  • Gary L. Duke

Organizations

  • Wright Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Birds
  • Boltzmann Equation
  • Charge Carriers
  • Charged Particles
  • Electric Discharges
  • Electron Density
  • Electron Energy
  • Electrons
  • Emission
  • Energy Transfer
  • Gas Discharges
  • Glow Discharges
  • Kinetics
  • Monte Carlo Method
  • Potential Energy
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Finite Element Method (FEM) for solving Partial Differential Equations (PDEs)
  • Plasma Physics.

Technology Areas

  • Microelectronics