Study of Computer Simulation of Sputtering from Nitrogen Reacted Molybdenum and Tungsten Targets.
Abstract
The Naval Postgraduate School simulation model, QDYN85, was used to investigate the sputtering of nitrogen reacted tungsten and molybdenum targets, where the nitrogen was placed in equilibrium positions both above and below the target surface plane. The cascades were initiated by bombarding the targets with argon ions with energies varying from 1 keV to 3 keV. The simulation results, when compared to experimental results obtained by Winters, indicate that the nitrogen position is not below the surface plane for either target but is located near the point where the adatom would be equidistant from its five nearest neighbors. Furthermore, the results show no multimer formation as a result of lattice fragmentation but do show dimer formation as a result of recombination above the target of individually sputtered atoms.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1986
- Accession Number
- ADA173586
Entities
People
- Stephen M. Webb
Organizations
- Naval Postgraduate School