Si on Alumina Phase Shifters.
Abstract
P-i-n diode phase shifters for operation below 10 GHz require a relatively small diode area in relation to the overall microstrip circuitry. Recrystallization of silicon islands deposited on alumina substrates is being explored as a means of providing the necessary diode material. Initial crystallization experiments with an electron beam have identified refinements needed to the system. A diode design study favors a lateral over a vertical p-i-n structure and suitable masks are in preparation. A method of evaluating minority carrier lifetime in thin silicon films on insulators has also been developed and will be used to evaluate recrystallized films. Keywords include: diode phase shifters, silicon on alumina, melt recrystallization.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1986
- Accession Number
- ADA174721
Entities
People
- Edward W. Maby
- Ronald J. Gutmann
Organizations
- Rensselaer Polytechnic Institute