GaAs Varactor Diode MMIC (Monolithic Microwave Integrated Circuit) Fabrication Technology.

Abstract

The design criteria and techniques developed to fabricate a monolithic low series resistance N on N+ GaAs varactor diode and the associated microwave circuit are described. Details of a high resolution polyimide patterning process developed for this device are included as is a description of the experimental work carried out to establish the practical design rules for the polyimide dielectric on chip capacitors. A description of the seven level mask set and associated processing are included and an assessment of the yield obtained on several wafers is discussed. The processing technology described in this memo has been successfully transferred to UK industry.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1987
Accession Number
ADA184022

Entities

People

  • B. T. Hughes
  • J. T. Parker
  • J. Woodward

Organizations

  • Royal Signals and Radar Establishment

Tags

DTIC Thesaurus Topics

  • Capacitors
  • Ceramic Materials
  • Design Criteria
  • Diodes
  • Electronics Industry
  • Fabrication
  • Integrated Circuits
  • Materials
  • Metal-Semiconductor Junctions
  • Microwave Integrated Circuits
  • Microwaves
  • Monolithic Microwave Integrated Circuits
  • Semiconductor Devices
  • Semiconductors
  • Specifications
  • Standards
  • Varactor Diodes

Fields of Study

  • Materials science

Readers

  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology
  • Systems Analysis and Design