X-Ray Lithographic Research: A Collection of NRL Contributions.

Abstract

Examined are x-ray and ultraviolet lithographic methods for the microfabrication of fine-line features, with particular emphasis on the use of high temperature plasmas as x-ray sources. Out of this work has come a series of scientific presentations and publications generated by a group of scientists at the Naval Research Laboratory, in collaboration with their coworkers at other institutions. These publications are collected under one cover in this report. Keywords: Radiation effects; Lasers; Exposure(General); Laser target interactions.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Aug 24, 1987
Accession Number
ADA188313

Entities

People

  • Robert R. Whitlock

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Construction
  • Diffraction
  • Frequency Combs
  • Integrated Circuits
  • Ionization
  • Laser Applications
  • Laser Beams
  • Laser Mediums
  • Light (Electromagnetic Radiation)
  • Materials
  • Materials Processing
  • Measurement
  • Photolithography
  • Semiconductors
  • X Ray Lithography
  • X Rays

Fields of Study

  • Physics

Readers

  • Business Analytics
  • Nanofabrication and Microfabrication.
  • Research Science/Academic Research

Technology Areas

  • Directed Energy