Laser Assisted CVD Growth of A1N and GaN

Abstract

This is the final report of a project for investigating laser (assisted) methods of growing nitrile thin films. We have grown thin films of AlN and SiN by laser ablation from powders. We have also developed an efficient method for laser assisted CVD of aluminum, or aluminum containing films from trimethylalaminum.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 20, 1993
Accession Number
ADA267150

Entities

People

  • Joan M. Frye
  • Joshua B. Halpern

Organizations

  • Howard University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Absorption
  • Air Force
  • Band Gaps
  • Ceramic Materials
  • Chemical Vapor Deposition
  • Chemistry
  • Laser Beams
  • Low Temperature
  • Materials
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Partial Pressure
  • Quantum Yields
  • Scattering
  • Spectra
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition