Nanofabrication of Electronic Devices With the Scanning Tunneling Microscope.

Abstract

This grant represents one year of funding plus a one-year, no-cost extension. The main achievements were: (1) Development of a new technique for imaging rapidly with the STM. (2) The reproducibility of the writing process was improved dramatically. (3) Commercial STM electronics were adapted to our STM. (4) Fabrication of the smallest continuous metallic lines to date: 24 nm wide. (5) Design and construction of a compact STM for nanofabrication. These main points are described briefly below and in more detail in the publications listed at the end. Other groups have followed our lead in using the STM to break down precursor gases to make nanoscale deposits, namely Matsui's group at NBC in Tsukuba, Japan, Kent's group at IBM Yorktown (now at New York University), Behm's group in Munchen, Germany, and Nayfeh's group at U. Illinois. This technique is therefore likely to become more important over the next decade. jg p.2

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Document Details

Document Type
Technical Report
Publication Date
Oct 31, 1994
Accession Number
ADA292463

Entities

People

  • Alejandro De Lozanne

Organizations

  • University of Texas at Austin

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Ball Bearings
  • Carbon Monoxide
  • Chambers
  • Chemical Vapor Deposition
  • Construction
  • Dielectric Gases
  • Electronics
  • Emission
  • Fabrication
  • Field Emission
  • Gases
  • Microscopes
  • Nanofabrication
  • New York
  • Quantum Tunneling
  • Scanning
  • Vapor Deposition

Readers

  • Academic Conference Management
  • Research Science/Academic Research
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene