Low Dielectric Constant Insulators and Gold Metallization for GHz Multi-Chip Modules. Part 2.

Abstract

The goal of this program is to investigate new dielectrics, metals and processes for the fabrication of multichip modules which hold the promise of exceptional electrical performance in the GHz region in addition to high yield and high reliability. The low dielectric constant insulators are being evaluated through the fabrication of in-situ test structures using noble metals. In the course of doing this evaluation, a simple process for gold or silver MCMs has been investigated.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1995
Accession Number
ADA306976

Entities

People

  • David Hertling
  • Paul A Kohl
  • Sue A. Bidstrup

Organizations

  • Georgia Tech

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Buffers (Chemistry)
  • Chemical Reaction Properties
  • Chemical Reactions
  • Chemical Synthesis
  • Chemistry
  • Dielectric Permittivity
  • Dielectric Properties
  • Dielectrics
  • Glass Transition Temperature
  • Manufacturing
  • Material Degradation Processes
  • Materials
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Modulus Of Elasticity
  • Refractive Index

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics