High Temperature Sensors and Arrays for Turbomachines

Abstract

The objective of this program was to create an apparatus and method for laser chemical vapor deposition (LCVD) of sensors in vacuum under control of a multi-axis positioning system. The system will be used to deposit sensors directly on the curved surfaces of turbine blades, which are insulated beforehand with a sputtered layer of alumina, 20 to 40 microns thick. This system embodies several departures from conventional LCVD. A continuous laser is employed instead of a pulsed laser, to improve the consistency and rate of deposition. The evaporation chamber is inside the vacuum chamber and closely coupled to the nozzle which floods the laser focal point. The entire vapor path is heated, with the objective of improving the speed and efficiency of vapor conversion to deposited metal. Unconverted vapor is scavenged by a carrier flow of inert gas before it can enter the main chamber.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1997
Accession Number
ADA330479

Entities

People

  • Lawrence W. Langley

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Chambers
  • Chemical Vapor Deposition
  • Evaporation
  • Fabrication
  • Films
  • Hypervelocity Flow
  • Laser Beams
  • Lasers
  • Manufacturing
  • Materials
  • Pulsed Lasers
  • Thin Films
  • Turbine Blades
  • Turbines
  • Vacuum
  • Vacuum Chambers
  • Vapor Deposition

Fields of Study

  • Physics

Readers

  • Organic Chemistry
  • Pulsed Power and Plasma Physics.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems