A Reliable Calibration Method for an Ion Current Controlled Electron Beam Transition Metal Deposition Source

Abstract

An alternative ion current controlled calibration scheme has been implemented for electron beam transition metal (Co) deposition sources. A repeatable and practical means of positioning the source (tip), measuring the ion flux and determining the flux rate is given. Intrinsic variations in the structural parameters and thermal effects which can modify the growth rate are examined and compensated for. A stable regime where ion beam current is directly proportional (+/- 5%) to the growth rate is determined.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1993
Accession Number
ADA332690

Entities

People

  • E. T. Bullock
  • G. G. Hembree
  • M. R. Scheinfein
  • S. T. Coyle

Organizations

  • Arizona State University

Tags

DTIC Thesaurus Topics

  • Accuracy
  • Calibration
  • Electron Beams
  • Electrons
  • Emission
  • Equations
  • Filaments
  • Heat Shields
  • Ion Beams
  • Ions
  • Materials
  • Measurement
  • Metals
  • Thickness
  • Transition Metals
  • Voltage

Fields of Study

  • Physics

Readers

  • Fluid Dynamics.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene