Synthesis and Characterization of Oxide Superlattice Coatings

Abstract

During this reporting period, we have made progress in the deposition and characterization of novel nanometer-layered yttria/zirconia coatings. Fully oxidized Y2O3/ZrO2 superlattices of bilayer thicknesses A ranging from 2 nm to 100 nm have been deposited at high rates of approximately equal 3.4 microns/hour, or 70% of the pure metal rates. The superlattices were structurally characterized using X-ray diffraction (XRD) and transmission electron microscopy (TEM). The ZrO2 layer exhibited its high temperature (greater than or equal 2400 deg C) cubic-fluorite structure at small layer thickness less than or equal 7 nm, epitaxially stabilized by the cubic Y2O3. The mechanical properties of the superlattices were measured using a nanoindenter and the thermal conductivity measurements by the 3omega method. The optical properties of oxides of Al, Y, Zr, and Y2O3/ZrO2 superlattices was investigated using spectroscopic ellipsometry. In addition, the thermal stability of the superlattices was investigated.

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Document Details

Document Type
Technical Report
Publication Date
Sep 02, 1998
Accession Number
ADA356570

Entities

People

  • Scott A. Barnett

Organizations

  • Northwestern University

Tags

Communities of Interest

  • Advanced Electronics
  • Space

DTIC Thesaurus Topics

  • Conductivity
  • Crystal Lattices
  • Diffraction
  • Electron Microscopy
  • Films
  • High Temperature
  • Materials
  • Measurement
  • Mechanical Properties
  • Optical Properties
  • Partial Pressure
  • Thermal Conductivity
  • Thermal Stability
  • Thickness
  • Transmission Electron Microscopy
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene