Effect of the Evaporation Temperature of a Tetraphenyl- Tetramethyl-Trisiloxane (Dow-Corning 704) Precursor on the Properties of Silicon Containing Diamond-Like Carbon (Si-DLC) Coatings Synthesized by Ion-Beam-Assisted Deposition (IBAD).

Abstract

Hard, adherent, and low-friction amorphous Si containing diamond-like carbon (Si-DLC) coatings has been synthesized both by 40-keV and 2.5-keV Ar ion-beam-assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C6H5)4(CH3)4Si3O2 oil onto Si wafer substrates. The sp sup 3 and sp sup 2 bonding ratio of the coatings was investigated with the aid of Fourier-transform infrared (FTIR) microspectroscopy and valence band x-ray photoelectron spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology is also discussed.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1999
Accession Number
ADA362492

Entities

People

  • C. G. Fountzoulas
  • C. W. Clayton
  • G. P. Halada
  • J. K. Hirvonen
  • M. E. Monserrat

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Coatings
  • Current Density
  • Deposition (Materials Processing)
  • Energy Bands
  • Evaporation
  • Films
  • Friction
  • Ion Beams
  • Ions
  • Military Research
  • Precursors
  • Sliding Friction
  • Spectroscopy
  • Valence
  • Valence Bands
  • X Ray Photoelectron Spectroscopy
  • X Rays

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Surface Engineering/Surface Coating Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene