III-V and IV-IV Materials and Processing Challenges for Highly Integrated Microelectronics and Optoelectronics, MRS Symposium Proceedings Held in Boston, Massachusetts on 30 November-3 December 1998. Volume 535
Abstract
This proceedings volume contains papers based on oral contributions from two symposia, Symposium D: "Integration of Dissimilar Materials in Micro- and Optoelectronics," and Symposium I: "III-V and SiGe Group IV Device/IC Processing Challenges for Commercial Applications," which were held during the 1998 MRS Fall Meeting in Boston, Massachusetts. The joint publication of these two symposia stems from the technologically-driven desire to achieve new levels of device functionality, and higher levels of performance via integration of devices based on dissimilar semiconductors, where the constraint of lattice-matching on the breadth of attainable devices can be reduced. Integration, by its very nature, is a challenging materials issue starting at the level of epitaxial growth all the way through final processing. It is the purpose of this proceedings to elucidate the breadth and depth of critical materials issues related to integration covering III-V, IV-IV, II-VI, and wide-bandgap semiconductor systems.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 03, 1998
- Accession Number
- ADA369927
Entities
People
- Robert Pachavis
Organizations
- Materials Research Society