Upgrade of Bernex 2000 Chemical Vapor Deposition Reactor

Abstract

A large process-zone Bernex 2000 CVD reactor was donated by DuPont to Clemson University in 1995. Due to lack of funds, the reactor was not activated until Fall 1998. initial runs of the reactor indicated major problems with the pumping system, graphite furnace and the gas/vapor supply systems. Through this project, fluids were obtained to repair the reactor and upgrade it for CVI processing of functionally graded coatings and CVD processing of ceramic/ceramic composites. The project was initiated on March 31, 1999. The proposed upgrade of Bernex 2000 has been completed. The pumping system has been completely redone and a new Liquid Ring Vacuum pump installed. New heating elements have been installed in the furnace and the furnace insulation repaired. Two new peristaltic pumps for metering SiCl4 and TiCl4 liquid precursors have been purchased, installed and wired to the control system. A smaller process-zone graphite furmace has been purchased and interfaced with Bernex 2000.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 17, 2000
Accession Number
ADA392628

Entities

People

  • Mica Grujicic

Organizations

  • Clemson University

Tags

Communities of Interest

  • Human Systems

DTIC Thesaurus Topics

  • Abstracts
  • Ceramic Matrix Composites
  • Chemical Vapor Deposition
  • Classification
  • Coatings
  • Composite Materials
  • Diamond Films
  • Films
  • Fluid Dynamics
  • Grain Size
  • Graphitic Materials
  • Heat Transfer
  • Materials
  • Materials Processing
  • Materials Science
  • Substrates
  • Vapor Deposition

Readers

  • Combustion science or combustion engineering.
  • Facility/Structural Engineering.
  • Reinforced Composite Materials

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene