Fabrication and Modification of Metal and Semiconductor Nanostructures Using Atomic Force Microscope

Abstract

Fund from the DURIP award was used to purchase an Atomic Force Microscope (Autoprobe CP from Vecco, CA). The unique closed-loop controller enables the instrument to have precise control of the locations of the AFM tips over a substrate. Such a capability has enabled the local chemical modification of nanostructures directly under the AFM tips. Over the project period, the instrument was purchased and installed and local chemical modification of GaN nanowires have been demonstrated. The transport properties of the nanoscale electronic device made of GaN nanowires between two metal electrodes showed significant change upon the AFM based chemical modification. The effect of applied voltage, reaction time and relative humidity was also studied.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADA419000

Entities

People

  • Jie Liu

Organizations

  • Duke University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Advanced Materials
  • Chemistry
  • Compound Semiconductors
  • Crystals
  • Electrochemical Reactions
  • Fabrication
  • Humidity
  • Materials
  • Materials Science
  • Nanolithography
  • Nanostructures
  • Nanowires
  • Physical Chemistry
  • Reaction Time
  • Semiconductors
  • Transport Properties
  • Transport Ships

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Research Science/Academic Research

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene